Pollution Control Systems for the Semiconductor and Microelectronics Industry


Systems for a Variety of process gas streams

semiconductor manufacturing-resized

The semiconductor and microelectronics industries utilize processes that produce gaseous airborne emissions.  

Chemical Etching and Chemical Vapor Deposition are two of the most common processes within the semiconductor industry.  


Common controllable emissions from the Semiconductor and Microelectronics industry:

  • Hydrofluoric Acid
  • Nitric Acid
  • Ammonia
  • Hydrochloric Acid
  • Phosphoric Acid
  • Chlorine
  • Hydrogen Bromide
  • Sulfuric Acid
  • Boron Trichloride
  • Dichlorosilane
  • Tungsten Hexafluoride

Common HEIL products and applications within this market include the following:

HEIL Engineers will gladly analyze your application to determine the best control technology recommended for the emissions.  

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Contact Information

ECS Industrial

2201 Taylors Valley Road,
             Belton, TX 76513

(888) 254-3966   Fax: 440-327-7088