Pollution Control Systems for the Semiconductor and Microelectronics Industry

Semiconductor

Systems for a Variety of process gas streams

The semiconductor and microelectronics industries utilize processes that produce gaseous airborne emissions.  

Chemical Etching and Chemical Vapor Deposition are two of the most common processes within the semiconductor industry.  

Common controllable emissions from the Semiconductor and Microelectronics industry:

• Hydrofluoric Acid
• Nitric Acid
• Ammonia
• Hydrochloric Acid
• Phosphoric Acid
• Chlorine
• Hydrogen Bromide
• Sulfuric Acid
• Boron Trichloride
• Dichlorosilane
• Tungsten Hexafluoride

Common HEIL products and applications within this market include the following:

• Large Series 730 Counter-current wet scrubbers or Series 740 Crossflow wet scrubbers for central fab emissions.  
• Series 770 Venturi Scrubbers for Particulate emissions